Preparation of TiO2 films by CVD method and study of its electrical, structural and optical properties | - CCMAR -

Journal Article

TítuloPreparation of TiO2 films by CVD method and study of its electrical, structural and optical properties
Publication TypeJournal Article
AuthorsV.G., B, Khmelinskii, IV, R.J.F., P, V.V., K, A.E., T, I.K., I
Year of Publication2002
JournalVacuum
Volume64
Start Page275
CCMAR Authors